Helios 5 PFIB DualBeam
Plasma focused ion beam scanning electron microscope for large volume 3D characterization and Ga-free sample S/TEM preparation.
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 | The Thermo Scientific Helios 5 Plasma FIB (PFIB) DualBeam (focused ion beam scanning electron microscope, or FIB-SEM) delivers unmatched capabilities for large-volume 3D characterization, gallium-free sample preparation and precise micromachining and is part of the fifth generation of the industry-leading Helios DualBeam family. It combines the new PFIB column and the monochromated Thermo Scientific Elstar SEM Column to deliver advanced focused ion and electron beam performance. Intuitive software and an unprecedented level of automation and ease-of-use enable you to observe and analyze relevant subsurface volumes. | |
Key Features
Gallium-free STEM and TEM sample preparationHigh-quality, gallium-free TEM and APT sample preparation thanks to the new PFIB column enabling 500 V Xe+ final polishing and delivering superior performance at all operating conditions. Next-generation 2.5 μA xenon plasma FIB columnHigh throughput and quality statistically relevant 3D characterization, cross-sectioning and micromachining using next generation 2.5 μA Xenon Plasma FIB column (PFIB). Sub-nanometer performance at low energiesReveal the finest details using best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies. Advanced capabilitiesMost advanced capabilities for electron and ion beam induced deposition and etching on FIB/SEM systems with optional Thermo Scientific MultiChem or GIS Gas Delivery Systems. Short time to nanoscale informationShortest time to nanoscale information for users with any experience level with SmartAlign and FLASH technologies. | Advanced automationFastest and easiest, automated, multisite in situ and ex situ TEM sample preparation and cross-sectioning using optional AutoTEM 5 Software. Multi-modal subsurface and 3D informationAccess high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software. Complete sample informationThe most complete sample information with sharp, refined, and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors. Artifact-free imagingArtifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan™ and DCFI Modes. Precise sample navigationPrecise sample navigation tailored to individual application needs thanks to the high stability and accuracy of 150 mm Piezo stage and optional in-chamber Nav-Cam. | |
For more details: https://www.thermofisher.com/tr/en/home/electron-microscopy/products/dualbeam-fib-sem-microscopes/helios-5-pfib-dualbeam.html